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Title:

RF wafer probing with improved contact repeatability using nanometer positioning
Author(s): Khadim Daffe, Gilles Dambrine, Fabian von Kleist-Retzow and Kamel Haddadi
Year: 2016
Month: May
Day: 27
Conference name: 87th ARFTG Microwave Measurement Conference (ARFTG)
DOI: 10.1109/ARFTG.2016.7501967

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