Title: |
RF wafer probing with improved contact repeatability using nanometer positioning |
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Author(s): | , , and |
Year: | 2016 |
Month: | May |
Day: | 27 |
Conference name: | 87th ARFTG Microwave Measurement Conference (ARFTG) |
DOI: | 10.1109/ARFTG.2016.7501967 |