Title: |
On-wafer residual error correction through adaptive filtering of verification line measurements |
|---|---|
| Author(s): | and |
| Year: | 2018 |
| Month: | November |
| Conference name: | 2018 International Workshop on Computing, Electromagnetics, and Machine Intelligence (CEMi) |
| DOI: | 10.1109/CEMI.2018.8610566 |
| ISBN: | 978-1-5386-7845-9 |
| File URL: | https://www.planarcal.ptb.de/fileadmin/documents/empir/14Ind02/documents/Open%20Access/CEMi18_ArzSavin_repo.pdf |