Title: |
On-wafer residual error correction through adaptive filtering of verification line measurements |
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Author(s): | and |
Year: | 2018 |
Month: | November |
Conference name: | 2018 International Workshop on Computing, Electromagnetics, and Machine Intelligence (CEMi) |
DOI: | 10.1109/CEMI.2018.8610566 |
ISBN: | 978-1-5386-7845-9 |
File URL: | https://www.planarcal.ptb.de/fileadmin/documents/empir/14Ind02/documents/Open%20Access/CEMi18_ArzSavin_repo.pdf |