Title: |
Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization |
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Author(s): | , , , , , , , , and |
Year: | 2017 |
Month: | October |
Conference name: | 2017 47th European Microwave Conference (EuMC) |
DOI: | 10.23919/EuMC.2017.8230973 |